Nano-positioning of a slender body using thermal actuator
نویسندگان
چکیده
Current rapid development in MEMS area has opened up many possibilities in nano-technology such as nano-fabrication. Among them is nanoscale wiring by both AFM (Atomic Force Microscope) tip and laser beam. Being able to make a relatively small deflection, a micro thermal actuator can be used to control the near field optics of the beam minutely and accurately. In this project, we will investigate the thermal actuator design that makes possible the thermal control of nano-positioning.
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